How Ramp Rate and Thermal Cycling Affect a Mica Heater Application

https://engineered-heat-solutions.stonefielddigest.com/posts/wafer-heater-basics-understanding-thermal-control-in-semiconductor-processing

In heated plates, a mica heater must deliver heat in a controlled way. It uses a resistive heating circuit supported and insulated by mica. One useful trait is high-temperature capability. Still, mechanical stress can change the result