How Thermal Mass Changes the Behavior of a Semiconductor Heater

https://polyimide-heater-guide.keystonescope.com/posts/how-etched-foil-construction-works-in-a-mica-heater

In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery